Silicon on insulator
SEMICONDUCTOR MANUFACTURING PROCESS
Silicon on Insulator; Silicon-On-Insulator; Silicon-on-insulator; SOI device; Semiconductor on insulator; SEMIconductor On Insulator; Semiconductor on Insulator; SOI MOSFET; Buried Oxide; Buried Oxide BOX; Buried OXide (BOX); FD-SOI; Buried oxide
In semiconductor manufacturing, silicon on insulator (SOI) technology is fabrication of silicon semiconductor devices in a layered silicon–insulator–silicon substrate, to reduce parasitic capacitance within the device, thereby improving performance. SOI-based devices differ from conventional silicon-built devices in that the silicon junction is above an electrical insulator, typically silicon dioxide or sapphire (these types of devices are called silicon on sapphire, or SOS).